Large range dual-axis micro-stage driven by electrostatic comb-drive actuators

Author： Olfatnia Mohammad   Cui Leqing   Chopra Pankaj   Awtar Shorya  

Publisher： IOP Publishing

ISSN： 0960-1317

Source： Journal of Micromechanics and Microengineering, Vol.23, Iss.10, 2013-10, pp. : 105008-105018

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