The design, simulation and fabrication of a novel horizontal sensitive inertial micro-switch with low g value based on MEMS micromachining technology

Author: Wang Yongliang   Feng Qiu   Wang Yan   Chen Wenguo   Wang Zhaoyu   Ding Guifu   Zhao Xiaolin  

Publisher: IOP Publishing

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.23, Iss.10, 2013-10, pp. : 105013-105022

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