Author: Röhrig Michael Schneider Marc Etienne Guénola Oulhadj Farid Pfannes Fabian Kolew Alexander Worgull Matthias Hölscher Hendrik
Publisher: IOP Publishing
ISSN: 0960-1317
Source: Journal of Micromechanics and Microengineering, Vol.23, Iss.10, 2013-10, pp. : 105014-105020
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