Author： Gatty Hithesh K Stemme Göran Roxhed Niclas
Publisher： IOP Publishing
E-ISSN： 1361-6439|25|10|105013-105022
ISSN： 0960-1317
Source： Journal of Micromechanics and Microengineering, Vol.25, Iss.10, 2015-10, pp. : 105013-105022
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