Author: Varel Çağdaş Shih Yi-Chun Otis Brian P Shen Tueng S Böhringer Karl F
Publisher: IOP Publishing
ISSN: 0960-1317
Source: Journal of Micromechanics and Microengineering, Vol.24, Iss.4, 2014-04, pp. : 45012-45019
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