Author： Takahashi Hidetoshi Thanh-Vinh Nguyen Jung Uijin G Matsumoto Kiyoshi Shimoyama Isao
Publisher： IOP Publishing
ISSN： 0960-1317
Source： Journal of Micromechanics and Microengineering, Vol.24, Iss.6, 2014-06, pp. : 65014-65022
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