Fabrication of nanoelectromechanical systems via the integration of high surface area glancing angle deposition thin films

Author： Westwood J N Sauer V T K Kwan J K Hiebert W K Sit J C

Publisher： IOP Publishing

ISSN： 0960-1317

Source： Journal of Micromechanics and Microengineering, Vol.24, Iss.6, 2014-06, pp. : 65021-65031

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