Reduction of out-of-plane warpage in surface micromachined beams using corrugation

Author: Gupta Arun   Barron Lance   Brainin Michael   Lee Jeong-Bong  

Publisher: IOP Publishing

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.24, Iss.6, 2014-06, pp. : 65023-65029

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