A 0.1–40 GHz broadband MEMS clamped–clamped beam capacitive power sensor based on GaAs technology

Author: Han Juzheng   Liao Xiaoping  

Publisher: IOP Publishing

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.24, Iss.6, 2014-06, pp. : 65024-65030

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