Alternated process for the deep etching of titanium

Author: Tillocher T   Lefaucheux P   Boutaud B   Dussart R  

Publisher: IOP Publishing

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.24, Iss.7, 2014-07, pp. : 75021-75030

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