Effects of rapid thermal annealing on ohmic contact of AlGaN/GaN HEMTs

Author: Yanxu Zhu   Weiwei Cao   Yuyu Fan   Ye Deng   Chen Xu  

Publisher: IOP Publishing

ISSN: 1674-4926

Source: Journal of Semiconductors, Vol.35, Iss.2, 2014-02, pp. : 26004-26007

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