Thermal conductivity of PECVD silicon-rich silicon nitride films measured with a SiO2/SixNy bimaterial microbridge test structure

Author: Jianqiang Han   Yan Li   Senlin Li   Qing Li  

Publisher: IOP Publishing

ISSN: 1674-4926

Source: Journal of Semiconductors, Vol.35, Iss.4, 2014-04, pp. : 46002-46005

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