A technique for evaluating the RF voltage across the electrodes of a capacitively-coupled plasma reactor

Author： Lisovskiy V.   Booth J.-P.   Landry K.   Douai D.   Cassagne V.   Yegorenkov V.  

Publisher： Edp Sciences

E-ISSN： 1286-0050|36|2|177-182

ISSN： 1286-0042

Source： EPJ Applied Physics (The), Vol.36, Iss.2, 2006-10, pp. : 177-182

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