Determination of multilayer thicknesses of GaAs/AlAs superlattice by grazing incidence X-ray reflectivity

Author： Ren L.L. Gao H.F. Gao S.T. Liu J.J. Zhang W.

E-ISSN： 2107-6847|4|2|81-86

ISSN： 2107-6839

Source： International Journal of Metrology and Quality Engineering, Vol.4, Iss.2, 2013-11, pp. : 81-86

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