“Plug-up”–a new concept for fabricating SOI MEMS devices

Author： Kiihamäki J.   Dekker J.   Pekko P.   Kattelus H.   Sillanpää T.   Mattila T.  

Publisher： Springer Publishing Company

ISSN： 0946-7076

Source： Microsystem Technologies, Vol.10, Iss.5, 2004-08, pp. : 346-350

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