Parallel-beams/lever electrothermal out-of-plane actuator

Author: Deladi S.   Krijnen G.   Elwenspoek M.C.  

Publisher: Springer Publishing Company

ISSN: 0946-7076

Source: Microsystem Technologies, Vol.10, Iss.5, 2004-08, pp. : 393-399

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Related content