High current densities in copper microcoils: influence of substrate on failure mode

Author： Moulin Johan   Woytasik Marion   Grandchamp Jean-Paul   Dufour-Gergam Elisabeth   Bosseboeuf Alain  

Publisher： Springer Publishing Company

ISSN： 0946-7076

Source： Microsystem Technologies, Vol.13, Iss.11-12, 2007-07, pp. : 1553-1558

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