Design and development of sub-micron scale specimens with electroplated structures for the microtensile testing of thin films

Author： Lin Ming-Tzer Tong Chi-Jia Chiang Chung-Hsun

Publisher： Springer Publishing Company

ISSN： 0946-7076

Source： Microsystem Technologies, Vol.13, Iss.11-12, 2007-07, pp. : 1559-1565

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