Fabrication of a polymeric tapered HARMs array utilizing a low-cost nickel electroplated mold insert

Author： Song In-Hyouk   Jin Yoonyoung   Ajmera Pratul  

Publisher： Springer Publishing Company

ISSN： 0946-7076

Source： Microsystem Technologies, Vol.13, Iss.3-4, 2007-02, pp. : 287-291

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