Au-free AlGaN/GaN heterostructure field-effect transistor with recessed overhang ohmic contacts using a Ti/Al bilayer

Author: LeeJae-Gil   KimHyun-Seop   KimDong-Hwan   HanSang-Woo   SeoKwang-Seok   ChaHo-Young  

Publisher: IOP Publishing

E-ISSN: 1361-6641|30|8|85005-85011

ISSN: 0268-1242

Source: Semiconductor Science and Technology, Vol.30, Iss.8, 2015-08, pp. : 85005-85011

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