In-situ wafer bowing measurements of GaN grown on Si (111) substrate by reflectivity mapping in metal organic chemical vapor deposition system

Author: Yi-Bin Yang   Ming-Gang Liu   Wei-Jie Chen   Xiao-Biao Han   Jie Chen   Xiu-Qi Lin   Jia-Li Lin   Hui Luo   Qiang Liao   Wen-Jie Zang   Yin-Song Chen   Yun-Ling Qiu   Zhi-Sheng Wu   Yang Liu   Bai-Jun Zhang  

Publisher: IOP Publishing

E-ISSN: 1741-4199|24|9|96103-96107

ISSN: 1674-1056

Source: Chinese Physics B, Vol.24, Iss.9, 2015-09, pp. : 96103-96107

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