Author: Chen Po-Lin Hong Rong-Hong Yang Sen-Yeu
Publisher: IOP Publishing
E-ISSN: 1361-6439|25|9|95001-95007
ISSN: 0960-1317
Source: Journal of Micromechanics and Microengineering, Vol.25, Iss.9, 2015-09, pp. : 95001-95007
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