Influences of ICP etching damages on the electronic properties of metal field plate 4H-SiC Schottky diodes

Author： Hui Wang   Yingxi Niu   Fei Yang   Yong Cai   Zehong Zhang   Zhongming Zeng   Minrui Wang   Chunhong Zeng   Baoshun Zhang  

Publisher： IOP Publishing

ISSN： 1674-4926

Source： Journal of Semiconductors, Vol.36, Iss.10, 2015-10, pp. : 104006-104011

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