Ion distribution functions at the electrodes of capacitively coupled high-pressure hydrogen discharges

Author： Schüngel Edmund   Mohr Sebastian   Schulze Julian   Czarnetzki Uwe   Kushner Mark J  

Publisher： IOP Publishing

E-ISSN： 1361-6595|23|1|15001-15008

ISSN： 0963-0252

Source： Plasma Sources Science and Technology, Vol.23, Iss.1, 2014-02, pp. : 15001-15008

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