Mitigation of residual oscillations in electrostatically actuated microbeams using a command-shaping approach

Author: Godara R K   Joglekar M M  

Publisher: IOP Publishing

E-ISSN: 1361-6439|25|11|115028-115042

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.25, Iss.11, 2015-11, pp. : 115028-115042

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