Optical and structural properties of InAs nanoclusters in crystalline Si obtained through sequential ion implantation and RTA

Publisher： John Wiley & Sons Inc

E-ISSN： 1862-6319|212|12|2686-2691

ISSN： 1862-6300

Source： PHYSICA STATUS SOLIDI (A) APPLICATIONS AND MATERIALS SCIENCE, Vol.212, Iss.12, 2015-12, pp. : 2686-2691

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