Analyse XPS des surfaces de Si et SiO2 exposées aux plasmas de CHF3 et CHF3—C2F6. Polymérisation et gravure

Publisher: Edp Sciences

E-ISSN: 0035-1687|24|3|309-321

ISSN: 0035-1687

Source: Revue de Physique Appliquée (Paris), Vol.24, Iss.3, 1989-03, pp. : 309-321

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