Fabrication of Wireless Micro Pressure Sensor Using the CMOS Process

Author: Dai Ching-Liang   Lu Po-Wei   Wu Chyan-Chyi   Chang Chienliu  

Publisher: MDPI

E-ISSN: 1424-8220|9|11|8748-8760

ISSN: 1424-8220

Source: Sensors, Vol.9, Iss.11, 2009-10, pp. : 8748-8760

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Abstract