Fabrication of Nanopillar Micropatterns by Hybrid Mask Lithography for Surface-Directed Liquid Flow

Author: Sakuma Shinya   Sugita Masakuni   Arai Fumihito  

Publisher: MDPI

E-ISSN: 2072-666x|4|2|232-242

ISSN: 2072-666x

Source: Micromachines, Vol.4, Iss.2, 2013-06, pp. : 232-242

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Abstract