Three-Dimensional Glass Monolithic Micro-Flexure Fabricated by Femtosecond Laser Exposure and Chemical Etching

Author: Tielen Viktor   Bellouard Yves  

Publisher: MDPI

E-ISSN: 2072-666x|5|3|697-710

ISSN: 2072-666x

Source: Micromachines, Vol.5, Iss.3, 2014-09, pp. : 697-710

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Abstract