Design, Fabrication, and Performance Characterization of LTCC-Based Capacitive Accelerometers

Author： Liu Huan   Fang Runiu   Miao Min   Zhang Yichuan   Yan Yingzhan   Tang Xiaoping   Lu Huixiang   Jin Yufeng  

Publisher： MDPI

E-ISSN： 2072-666x|9|3|120-120

ISSN： 2072-666x

Source： Micromachines, Vol.9, Iss.3, 2018-03, pp. : 120-120

Access to resources Favorite

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract

Related content

Design and Performance Analysis of Capacitive Micromachined Ultrasonic Transducer Linear Array

By Wang Hongliang   Wang Xiangjun   He Changde   Xue Chenyang  

Micromachines, Vol. 5, Iss. 3, 2014-07 ,pp. : 420-431

MDPI

Access to resources Recommend Favorite

Fabrication and Characterization of Capacitive Micromachined Ultrasonic Transducers with Low-Temperature Wafer Direct Bonding

By Wang Xiaoqing   Yu Yude   Ning Jin  

Micromachines, Vol. 7, Iss. 12, 2016-12 ,pp. : 226-226

MDPI

Access to resources Recommend Favorite

Design, Fabrication and Computational Characterization of a 3D Micro-Valve Built by Multi-Photon Polymerization

By Galanopoulos Stratos   Chatzidai Nikoleta   Melissinaki Vasileia   Selimis Alexandros   Schizas Charalampos   Farsari Maria   Karalekas Dimitris  

Micromachines, Vol. 5, Iss. 3, 2014-08 ,pp. : 505-514

MDPI

Access to resources Recommend Favorite

Landsat-8 Operational Land Imager Design, Characterization and Performance

By Knight Edward J.   Kvaran Geir  

Remote Sensing, Vol. 6, Iss. 11, 2014-10 ,pp. : 10286-10305

MDPI

Access to resources Recommend Favorite

Design Optimization and Fabrication of High-Sensitivity SOI Pressure Sensors with High Signal-to-Noise Ratios Based on Silicon Nanowire Piezoresistors

By Zhang Jiahong   Zhao Yang   Ge Yixian   Li Min   Yang Lijuan   Mao Xiaoli  

Micromachines, Vol. 7, Iss. 10, 2016-10 ,pp. : 187-187

MDPI

Access to resources Recommend Favorite