Extension, Closure and Conversion of In-Grown Stacking Faults in 4H-SiC Epilayers

Publisher: Trans Tech Publications

E-ISSN: 1662-9752|2018|924|155-159

ISSN: 0255-5476

Source: Materials Science Forum, Vol.2018, Iss.924, 2018-07, pp. : 155-159

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Abstract