Mechanical strength study of SiO2 isolation blocks merged in silicon substrate

Publisher: IOP Publishing

E-ISSN: 1361-6439|25|1|15014-15024

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.25, Iss.1, 2015-01, pp. : 15014-15024

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Abstract