Design and test of reliable high strength ingressive polycrystalline silicon microgripper arrays

Publisher: IOP Publishing

E-ISSN: 1361-6439|25|1|15009-15020

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.25, Iss.1, 2015-01, pp. : 15009-15020

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Abstract