Temporal evolution of electron density in a low pressure pulsed two-frequency (60 MHz/2 MHz) capacitively coupled plasma discharge

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Plasma Sources Science and Technology, Vol. 23, Iss. 6, 2014-12 ,pp. : 65046-65053

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Electron bounce resonance heating in dual-frequency capacitively coupled oxygen discharges

By Liu Yong-Xin   Zhang Quan-Zhi   Liu Jia   Song Yuan-Hong   Bogaerts Annemie   Wang You-Nian  

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On the role of metastables in capacitively coupled oxygen discharges

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Plasma Sources Science and Technology, Vol. 24, Iss. 3, 2015-06 ,pp. : 35016-35026

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Time-resolved ion flux, electron temperature and plasma density measurements in a pulsed Ar plasma using a capacitively coupled planar probe

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Modeling of the nanoparticle coagulation in pulsed radio-frequency capacitively coupled C₂H₂ discharges

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Chinese Physics B, Vol. 24, Iss. 7, 2015-07 ,pp. : 75204-75209

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