Author: Zhang Qian Wang Yufeng Zhao Lurui Zhang Qian
Publisher: IOP Publishing
E-ISSN: 1361-6439|26|2|25019-25028
ISSN: 0960-1317
Source: Journal of Micromechanics and Microengineering, Vol.26, Iss.2, 2016-02, pp. : 25019-25028
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Abstract