Effect of Ti Sputtering Current on Structure of TiCrN Thin Films Prepared by Reactive DC Magnetron Co-Sputtering
Publisher: Trans Tech Publications
E-ISSN: 1662-9795|2016|675|181-184
ISSN: 1013-9826
Source: Key Engineering Materials, Vol.2016, Iss.675, 2016-02, pp. : 181-184
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Abstract