Effect of Assisted-Ion-Beam Gases on the Structure of Amorphous Silicon Thin Films Prepared by Ion-Beam-Assisted Sputtering

Publisher： Trans Tech Publications

E-ISSN： 1662-9752|2016|852|1102-1107

ISSN： 0255-5476

Source： Materials Science Forum, Vol.2016, Iss.852, 2016-05, pp. : 1102-1107

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