Deposition mechanism of sputtered amorphous carbon nitride thin film

Author: Durand-Drouhin O.   Benlahsen M.   Clin M.   Bouzerar R.  

Publisher: Elsevier

ISSN: 0169-4332

Source: Applied Surface Science, Vol.223, Iss.4, 2004-02, pp. : 269-274

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