Deposition of GaN films on (111) Si substrates by alternate supply of TMG and NH 3

Author： Gong J.-R.   Yeh M.-F.   Tsai Y.-L.  

Publisher： Elsevier

ISSN： 0925-3467

Source： Optical Materials, Vol.24, Iss.4, 2004-01, pp. : 615-619

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