Fabrication of RF MEMS variable capacitors by deep X-ray lithography and electroplating

By Achenbach Sven   Klymyshyn David   Haluzan Darcy   Mappes Timo   Wells Garth   Mohr Jürgen  

Microsystem Technologies, Vol. 13, Iss. 3-4, 2007-02 ,pp. : 343-347

Springer Publishing Company

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Design of novel compact anti-stiction and low insertion loss RF MEMS switch

By Bansal Deepak   Kumar Amit   Sharma Akshdeep   Kumar Prem   Rangra K.  

Microsystem Technologies, Vol. 20, Iss. 2, 2014-02 ,pp. : 337-340

Springer Publishing Company

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Design and synthesis of wide tuning range variable comb drive MEMS capacitors

By Wan Weijie   Lowther David A.  

COMPEL: Int J for Computation and Maths. in Electrical and Electronic Eng., Vol. 26, Iss. 3, 2007-06 ,pp. : 689-699

Emerald Group Publishing Ltd

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Chip-level integration of RF MEMS on-chip inductors using UV-LIGA technique

By Park Daniel  

Microsystem Technologies, Vol. 14, Iss. 9-11, 2008-10 ,pp. : 1429-1438

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Investigation of actuation voltage for non-uniform serpentine flexure design of RF-MEMS switch

By Sharma Ashish   Gupta Navneet  

Microsystem Technologies, Vol. 20, Iss. 3, 2014-03 ,pp. : 413-418

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