Submicron-scale surface acoustic wave resonators fabricated by high aspect ratio X-ray lithography and aluminum lift-off

By Achenbach Sven  

Microsystem Technologies, Vol. 14, Iss. 9-11, 2008-10 ,pp. : 1715-1719

Springer Publishing Company

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Fabrication of Fresnel zone plates with high aspect ratio by soft X-ray lithography

By Liu Longhua  

Microsystem Technologies, Vol. 14, Iss. 9-11, 2008-10 ,pp. : 1251-1255

Springer Publishing Company

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Deep sub micron high aspect ratio polymer structures produced by hard X-ray lithography

By Achenbach S.  

Microsystem Technologies, Vol. 10, Iss. 6-7, 2004-10 ,pp. : 493-497

Springer Publishing Company

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High throughput projection UV lithography of high-aspect-ratio thick SU-8 microstructures

By Yang Ren  

Microsystem Technologies, Vol. 14, Iss. 9-11, 2008-10 ,pp. : 1233-1243

Springer Publishing Company

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Submicron polymer structures with X-ray lithography and hot embossing

By Mappes Timo  

Microsystem Technologies, Vol. 14, Iss. 9-11, 2008-10 ,pp. : 1721-1725

Springer Publishing Company

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