Fabrication of microgratings on PMMA plate and curved surface by using copper mesh as X-ray lithography mask

By Li Yigui   Sugiyama Susumu  

Microsystem Technologies, Vol. 13, Iss. 3-4, 2007-02 ,pp. : 227-230

Springer Publishing Company

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Geometrical strengthening and tip-sharpening of a microneedle array fabricated by X-ray lithography

By Khumpuang Sommawan   Horade Mitsuhiro   Fujioka Kazuya   Sugiyama Susumu  

Microsystem Technologies, Vol. 13, Iss. 3-4, 2007-02 ,pp. : 209-214

Springer Publishing Company

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Fabrication of comb-drive micro-actuators based on UV lithography of SU-8 and electroless plating technique

By Dai Wen  

Microsystem Technologies, Vol. 14, Iss. 9-11, 2008-10 ,pp. : 1745-1750

Springer Publishing Company

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High throughput projection UV lithography of high-aspect-ratio thick SU-8 microstructures

By Yang Ren  

Microsystem Technologies, Vol. 14, Iss. 9-11, 2008-10 ,pp. : 1233-1243

Springer Publishing Company

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SU-8 3D microoptic components fabricated by inclined UV lithography in water

By Ling Z.   Lian K.  

Microsystem Technologies, Vol. 13, Iss. 3-4, 2007-02 ,pp. : 245-251

Springer Publishing Company

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