Author: Wada Akira Yanagisawa Yuuki Altansukh Batnasan Kubota Tomohiro Ono Takahito Yamasaki Satoshi Samukawa Seiji
Publisher: IOP Publishing
ISSN: 0960-1317
Source: Journal of Micromechanics and Microengineering, Vol.23, Iss.6, 2013-06, pp. : 65020-65026
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