Texture of Cu and dilute binary Cu-alloy films: impact of annealing and solute content

Author： Barmak K.   Gungor A.   Rollett A.D.   Cabral C.   Harper J.M.E.  

Publisher： Elsevier

ISSN： 1369-8001

Source： Materials Science in Semiconductor Processing, Vol.6, Iss.4, 2003-08, pp. : 175-184

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Related content

Grain Size and Texture of Cu 2 ZnSnS 4 Thin Films Synthesized by Cosputtering Binary Sulfides and Annealing: Effects of Processing Conditions and Sodium

By HLAING Oo W.M.  

Journal of Electronic Materials, Vol. 40, Iss. 11, 2011-11 ,pp. : 2214-2221

Springer Publishing Company

Access to resources Recommend Favorite

The Application of Barrierless Metallization in Making Copper Alloy, Cu(RuHfN), Films for Fine Interconnects

By Lin C.H.  

Journal of Electronic Materials, Vol. 39, Iss. 11, 2010-11 ,pp. : 2441-2447

Springer Publishing Company

Access to resources Recommend Favorite

Impact of thermal cycling on the evolution of grain, precipitate and dislocation structure in Al, 0.5% Cu, 1% Si thin films

By Kaouache B.   Gergaud P.   Thomas O.   Bostrom O.   Legros M.  

Microelectronic Engineering, Vol. 70, Iss. 2, 2003-11 ,pp. : 447-454

Elsevier

Access to resources Recommend Favorite

Microstructural investigation of electrodeposited CuAg-thin films

By Strehle S.   Menzel S.   Wendrock H.   Acker J.   Wetzig K.  

Microelectronic Engineering, Vol. 70, Iss. 2, 2003-11 ,pp. : 506-511

Elsevier

Access to resources Recommend Favorite

Small-scale plasticity in thin Cu and Al films

By Dehm G.   Balk T.J.   Edongue H.   Arzt E.  

Microelectronic Engineering, Vol. 70, Iss. 2, 2003-11 ,pp. : 412-424

Elsevier

Access to resources Recommend Favorite