MOVPE growth of Si-doped GaAs and Al x Ga 1-x As using tertiarybutylarsine (TBA) in pure N 2 ambient

Author: Huang G.S.   Tang X.H.   Zhang B.L.  

Publisher: Elsevier

ISSN: 1369-8001

Source: Materials Science in Semiconductor Processing, Vol.6, Iss.4, 2003-08, pp. : 171-174

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