Room Temperature Deposition of Silicon Nanodot Clusters by Plasma-Enhanced Chemical Vapor Deposition

Author: Kim Jae-Kwan   Kim Jun Young   Yoon Jae-Sik   Lee Ji-Myon  

Publisher: American Scientific Publishers

ISSN: 1533-4899

Source: Journal of Nanoscience and Nanotechnology, Vol.13, Iss.10, 2013-10, pp. : 7173-7176

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