INVESTIGATION ON ANTI-REFLECTION PROPERTY OF NITROGEN DOPED DIAMOND-LIKE CARBON (DLC) FILMS PRODUCED BY RF MAGNETRON SPUTTERING

Author: Vinod P.R.  

Publisher: Taylor & Francis Ltd

ISSN: 1058-725X

Source: Molecular Crystals and Liquid Crystals Science and Technology. Section A. Molecular Crystals and Liquid Crystals, Vol.386, Iss.1, 2002-01, pp. : 61-66

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