The mechanical properties of thin alumina films deposited by metal-organic chemical vapour deposition

Author: Fransen T.   Haanappel V.A.C.   Van der Vendel D.   Metselaar H.S.C.   Van Corbach H.D.   Gellings P.J.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.254, Iss.1, 1995-01, pp. : 153-163

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Abstract