Influence of the formation conditions on the microstructure of porous silicon layers studied by spectroscopic ellipsometry

Author： Rossow U. Frotscher U. Thonissen M. Berger M.G. Frohnhoff S. Munder H. Richter W.

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.255, Iss.1, 1995-01, pp. : 5-8

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